Stainless steel heater housing fab

Tue, 02 Jun 2026 06:23:12 +0800

On the fab floor, you learn fast: a 0.5°C drift in the photoresist bake can throw off CD uniformity, and one particle event can wipe out a whole lot. We built the stainless steel heater housing to keep thermal performance locked inside the process window—shift after shift, lot after lot. What matters, technically The housing is 316L stainless, chosen for corrosion resistance and low outgassing in Class 1–100 cleanrooms. Integrated short-wave infrared elements get you up to temperature quickly, with tight control that keeps wafer-level uniformity within ±0.1°C across 150 mm and 200 mm substrates. Bake-to-bake repeatability lands at ±0.5°C, so your soft bake and hard bake profiles stay intact. The airflow design cuts turbulence and removes dead zones, keeping particle generation under 0.01 particles/cm² under normal operation. Why it holds up in real litho work This housing is aimed at lithography-adjacent thermal steps where your thermal budget is tight. It holds setpoint through batch transitions, cuts warm-up wait time, and keeps yield steady by holding photoresist viscosity and film stress where they need to be. Power use stays disciplined—targeted heating and low standby losses—and the build is meant for 24/7 fab life with fewer maintenance interruptions. What you need to plan for Installation comes down to matching the tool interface and confirming airflow direction; if those are off, uniformity suffers. The heater only delivers its rated performance when the cleanroom supply air meets the specified temperature and particulate levels. Plan on periodic sensor calibration and element inspection. That’s how you keep ±0.1°C uniformity consistent over thousands of cycles.

Housing on Custom Infrared Heat Solutions

Stainless steel heater housing fab