http://ir-heat-solutions.com/en/tags/mems/ Recent content in MEMS on Custom Infrared Heat Solutions Hugo en-us Thu, 30 Jul 2026 11:13:16 +0800 http://ir-heat-solutions.com/en/posts/using-directional-ir-heating-to-prevent-equipment-overheating-in-mems-wafer-drying/ Thu, 30 Jul 2026 11:13:16 +0800 http://ir-heat-solutions.com/en/posts/using-directional-ir-heating-to-prevent-equipment-overheating-in-mems-wafer-drying/ <p><img src="http://ir-heat-solutions.com/images/0ea7296bcdd661f341d1983d454c4037.png" alt="MEMS sensor wafer drying heater"></p> <h1 id="drying-mems-wafers-without-the-headache">Drying MEMS Wafers Without the Headache</h1> <p>If you&rsquo;ve ever worked in MEMS fabrication, you know the struggle of drying wafers. It&rsquo;s a total bottleneck. You need the liquid gone, and you need it gone without leaving a single speck of residue behind. Our approach? We use short-wave IR lamps to hit the wafer surface directly. It’s basically a flash-evaporation trick. The goal is to get the wafer bone-dry without turning the entire tool chamber into a sauna.</p>